The Leader in Linear Motors

When it comes to semiconductor fabrication, time may be money, but yield trumps all. So critical requirement for process steps must obviously clock with economically-viable throughputs, testing is every bit as important.

With critical dimensions currently in the tens of nanometers across wafers as large as 450 mm, the ability to effectively and repeatably position wafers, optics and measurement equipment is crucial to capturing accurate data. That makes motion control an essential supporting technology for the semiconductor industry.

This XY Stage Assembly using the latest Linear Motor Technology provide the requirement needed for fast and accurate position movement for Prober Wafer Testing.

Assembly Photo	Description	Industry	Applications	Assembly	Specification
	PSM XY-Stage Assembly 55X55	Semiconductor	Wafer Test	Prober	X/Y Probing Area X:±175mm Y:+280mm, -175mm Accuracy:±1㎛ Control Resolution:0.2㎛ Maximum Speed:300mm/s